Weizong Xu 1,2,*†Yating Shi 1†Fangfang Ren 1Dong Zhou 1[ ... ]Hai Lu 1,3,*
Author Affiliations
Abstract
1 School of Electronic Science and Engineering, Nanjing University, Nanjing 210023, China
2 e-mail: wz.xu@nju.edu.cn
3 e-mail: hailu@nju.edu.cn
In this work, a GaN p-i-n diode based on Mg ion implantation for visible-blind UV detection is demonstrated. With an optimized implantation and annealing process, a p-GaN layer and corresponding GaN p-i-n photodiode are achieved via Mg implantation. As revealed in the UV detection characterizations, these diodes exhibit a sharp wavelength cutoff at 365 nm, high UV/visible rejection ratio of 1.2×104, and high photoresponsivity of 0.35 A/W, and are proved to be comparable with commercially available GaN p-n photodiodes. Additionally, a localized states-related gain mechanism is systematically investigated, and a relevant physics model of electric-field-assisted photocarrier hopping is proposed. The demonstrated Mg ion-implantation-based approach is believed to be an applicable and CMOS-process-compatible technology for GaN-based p-i-n photodiodes.
Photonics Research
2019, 7(8): 08000B48

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